The filter under it may be clogged up with carbon as well. You have to remove the ISC from the manifold (2 bolts) and the filter is under it in a recess on the manifold...it looks like a little spoke mag wheel. Don't try and clean it...buy a new one from Toyota.
To clean the ISC itself, remove it from the manifold and take the 3 screws off that hold the black electric valve on the flange. Be careful, the screws are easy to strip the philips head. Take some carb or brake cleaner and clean the spring/valve head...clean the valve seat side too on the flange. I wouldn't use Simple Green on the electric side...good stuff, but wouldn't want it getting inside the electric part. Reassemble by aligning the philips screw holes and tighten down a little at a time by going around all 3.